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Dr. Mark L Schattenburg

Senior Research Scientist
Director, Space Nanotechnology Laboratory (SNL)
Associate Director, NanoStructures Laboratory
Senior Research Affiliate, Microsystems Tehnology Laboratories

Primary DLC

MIT Kavli Institute for Astrophysics and Space Research

MIT Room: 37-487
(617) 253-3180

Areas of Interest and Expertise

Micro and Nanofabrication Technology Applied to Advanced Astronomical and Laboratory Instrumentation
X-Ray, E-Beam, Ion-Beam, and Optical Lithography
Nanometer-Period Gratings and Grids Fabricated by Interference Lithography
X-Ray Optics and Instrumentation
Advanced Lithography, Including X-Ray, E-Beam, Ion-Beam and Optical
MEMs Structures Applied to High-Precision Optical Assembly

Recent Work

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