Prof. L Rafael Reif

Professor of Electrical Engineering

Primary DLC

Office of the President

MIT Room: 3-208

Areas of Interest and Expertise

Integrated Circuit Fabrication Technology
New Process Technologies for VLSI
Multilevel Interconect Technologies
Three-Dimensional Integration
Environmentally-Benign Semiconductor Manufacturing
Low Temperature Deposition of Epitaxial and Polycrystalline Silicon and SiGe Alloys
Heteroepitaxial Bipolar Transistors
Thin Film Transistors
In Situ, Real-Time Monitorying of Unit Process Steps
Novel Interconnect Technologies

Recent Work