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Prof. L Rafael Reif
President Emeritus
Professor of Electrical Engineering and Computer Science
Primary DLC
Department of Electrical Engineering and Computer Science
MIT Room:
1-229
(617) 253-7317
reif@mit.edu
https://www.eecs.mit.edu/people/l-rafael-reif/
Areas of Interest and Expertise
Integrated Circuit Fabrication Technology
New Process Technologies for VLSI
Multilevel Interconect Technologies
Three-Dimensional Integration
Environmentally-Benign Semiconductor Manufacturing
Low Temperature Deposition of Epitaxial and Polycrystalline Silicon and SiGe Alloys
Heteroepitaxial Bipolar Transistors
Thin Film Transistors
In Situ, Real-Time Monitorying of Unit Process Steps
Novel Interconnect Technologies
Recent Work
Projects
May 30, 2000
Department of Electrical Engineering and Computer Science
Singapore National Research Foundation (NRF)
Principal Investigator
L Reif
Related Faculty
Prof. Jae S Lim
Professor of Electrical Engineering
Dr. Jiahui Chen
Graduate Student
Eunseok Lee
Graduate Student