Prof. Lionel C Kimerling

Thomas Lord Professor of Materials Science and Engineering
Director, Initiative for Knowledge & Innovation in Manufacturing (IKIM)
Director, Microphotonics Center

Primary DLC

Department of Materials Science and Engineering

MIT Room: 13-4118


Sandra Crawford-Jenkins

Areas of Interest and Expertise

Opto-Electronic Devices
Integrated IC Materials and Processing
Processes for Photonics
Properties and Processing of Electronic Materials
Imperfection in Solids
Si, SiGe, III-W Compounds and Alloys
Optoelectronic Devces
Silicon Microphotonics
New Optical and Electronic Phenomena
Device and Circuit Applications
Imperfection in Solids
EnvironmentallyBenign Semiconductor Manufacturing Chemical Kinetics and Equilibrium of Surfaces
Semiconductors and Photonic Bandgap Devices

Research Summary

Professor Kimerling's research has had fundamental impact on the understanding of the chemical and electrical properties of defects in semiconductors and in the use of this knowledge in materials processing and component reliability. His research teams have enabled long-lived telecommunications lasers, produced the first 1MB DRAM, developed semiconductor diagnostic methods such as DLTS, SEM-EBIC and RF-PCD, and pioneered silicon microphotonics. His MIT research on silicon processing has addressed integrated circuit fabrication, microphotonic materials and devices, solar energy conversion and environmentally benign integrated circuit manufacturing. His group's Microphotonics research has produced a series of first ever achievements with the goal of monolithic integration of optical interconnection with integrated microelectronic circuit chips.

Recent Work

  • Video


    May 4, 2021Conference Video Duration: 121:53
    Thomas Malone
    Patrick J McGovern (1959) Professor of Management
    Founding Director, Center for Collective Intelligence (CCI)
    MIT Sloan School of Management
    Lionel Kimerling
    Thomas Lord Professor of Materials Science and Engineering 
    Director, Microphotonics Center
    MIT Department of Materials Science and Engineering
    William B. Bonvillian
    Lecturer, Science Technology and Society and Political Science Departments
    Deb Phillips
    President, WFD Consulting
    Benjamin A. Langis
    Senior Vice President
    Head of the Workplace of the Future, State Street