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Prof. Herbert H Sawin
Professor of Chemical and Electrical Engineering, Emeritus
Primary DLC
Department of Chemical Engineering
MIT Room:
66-568
(617) 253-4570
hhsawin@mit.edu
https://cheme.mit.edu/profile/herbert-h-sawin/
Areas of Interest and Expertise
Directional Plasma Etching
Dry Wafer Cleaning
Kinetics
Surface Science
Process Modeling
Recent Work
Projects
March 17, 2009
Department of Chemical Engineering
The Sawin Squad
Principal Investigator
Herbert Sawin
Related Faculty
Prof. Patrick S Doyle
Robert T Haslam (1911) Professor of Chemical Engineering
Prof. Katie E Galloway
Assistant Professor of Chemical Engineering
Robert T Hanlon
Senior Lecturer