Dr. Mark L Schattenburg
Senior Research Scientist
Director, Space Nanotechnology Laboratory (SNL)
Associate Director, NanoStructures Laboratory
Senior Research Affiliate, Microsystems Tehnology Laboratories
Associate Director, NanoStructures Laboratory
Senior Research Affiliate, Microsystems Tehnology Laboratories
Primary DLC
MIT Kavli Institute for Astrophysics and Space Research
MIT Room:
37-487
Areas of Interest and Expertise
Micro and Nanofabrication Technology Applied to Advanced Astronomical and Laboratory Instrumentation
X-Ray, E-Beam, Ion-Beam, and Optical Lithography
Nanometer-Period Gratings and Grids Fabricated by Interference Lithography
X-Ray Optics and Instrumentation
Advanced Lithography, Including X-Ray, E-Beam, Ion-Beam and Optical
MEMs Structures Applied to High-Precision Optical Assembly
X-Ray, E-Beam, Ion-Beam, and Optical Lithography
Nanometer-Period Gratings and Grids Fabricated by Interference Lithography
X-Ray Optics and Instrumentation
Advanced Lithography, Including X-Ray, E-Beam, Ion-Beam and Optical
MEMs Structures Applied to High-Precision Optical Assembly