Bio-Inspired MEMS Sensors for Underwater Sensing Applications

Certain fish have a superior ability to navigate blindly in a complex underwater environment. They perform this unique feat by relying on their lateral-line, consisting of arrays of biological sensors (neuromast) that interact with surrounding flow. An artificial man-made analogue similar to the lateral-line could greatly benefit current unmanned underwater vehicles (UUVs) that operate in a similarly difficult environments. In this work, we developed flexible arrays of microelectromechanical systems (MEMS) pressure and flow sensors that are easy to fabricate, highly sensitive, low-cost, low-powered, surface-mountable, and are capable of withstanding harsh seawater environments. In a quest for reliability and high sensitivity, we developed lithographically fabricated micro sensors out of novel soft polymer materials like polydimethylsiloxane (PDMS) and liquid crystal polymer (LCP) with conductive piezoresistive sensing elements over conventionally used silicon material.