Nanostructured Sensors

Functionalizing origami surface with velocity sensor for unmanned scouting vehicles, e.g. micro flying robot, is another area we have explored lately. A novel velocity sensor is proposed that is adequate for a miniature vehicle; it is small in size and has low power consuming sensing mechanism. The sensor utilizes the bending of 90 degree folded flexible silicon nitride cantilever when drag force of the air flow is exerted on the surface. The detection takes place as 60 degree folded cantilever tip touches the electrode, making a transition from “OFF” to “ON” switch. An array of sensors with different dimensions, which accounts for different bending stiffness will be implemented for continuous detection of varying velocity. The dimensions of the sensor are determined based on the boundary layer theory and the basic solid mechanics. We show the fabricated velocity sensors that used Ga+ ion implantation to actuate the folding. The array of sensors will provide digitalized output signals which will be converted to define the current velocity of the flow. Power consumption is minimized since the sensor relies on simple OFF to ON switching detection.