Entry Date:
October 30, 2008

Solid-State Applications of Nanoscale Lithography


Graphene holds promise as a high-mobility alternative to silicon for beyond-next-generation information-processing devices. But to create a bandgap (and thus permit device development), it must be patterned to sub-10-nanometer dimensions. Similarly, a range of beyond-next-generation information-processing devices require prototyping at the sub-10-nanometer length scale. In this research thrust, the Berggren group works to develop tools and techniques for prototyping such systems.