Entry Date:
May 10, 2007

Nano-Scale Machining with Femtosecond Laser Pulses

Principal Investigator Carl Thompson


Researchers at the Panasonic Boston Laboratory have demonstrated the use of femtosecond laser pulses to drill 200nm-diameter holes in silicon films on insulating substrates. This technology has potential applications in microphotonics. We are collaborating in research on microstructural evolution in the vicinity of the drilled holes. This is expected to provide further insight into the drilling mechanism.