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Dr. Hanqing Li
Research Scientist
Primary DLC
Microsystems Technology Laboratories
MIT Room:
39-513
(617) 258-5920
hqli@mit.edu
Areas of Interest and Expertise
Micro and Nanotechnologies
MEMS Device Fabrication: Micro Engine, Micro Rocket, Micro Thruster, Micro Pump
MEMS Device Packaging and Testing
Post-Processing of CMOS Photonics Systems
Superconducting Thin Film Materials and Devices
Recent Work
Related Faculty
Dennis Buss
Visiting Scientist
Chiraag Shashikant Juvekar
Research Affiliate
Mr. Michael B McIlrath
Research Scientist